About: http://webisa.webdatacommons.org/283065601

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The mask 24 may be subsequently removed, for example by ashing, to expose the lower electrode 22. [0030] In some embodiments, the size of the closed region of mask 24 may be the minimum feat
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr