About: http://webisa.webdatacommons.org/283081888

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This invention relates in general to the field of vacuum systems and deposition technology for plating and coating materials and more particularly to a configurable vacuum system and method.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com