About: http://webisa.webdatacommons.org/283486567

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Therefore, an optical system having three common foci at the mercury g-, h- and i-lines may be particularly useful in the production of relatively coarse structures in wafer-level packaging.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com