About: http://webisa.webdatacommons.org/283508910

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The thickness of the silicon film 1 may be typically less than 0.1 ??m, for example about 0.05 ??m or less.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com