About: http://webisa.webdatacommons.org/283624318

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The width of any feature etched into PSG layer 417 is kept at a minimum, for example between 10-15 microns.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com