About: http://webisa.webdatacommons.org/283782730

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The first interlayer insulating film 161 is formed by an insulating film including silicon and having a thickness of 100 through 200 nm by using a plasma CVD process or a sputtering process.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com