About: http://webisa.webdatacommons.org/283805053

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Thus the polish stop layer employed in the present invention is a material that serves an etch stop layer, while not significantly increasing the effective dielectric constant of the device.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com