About: http://webisa.webdatacommons.org/283900121

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	They may be formed using LIGA or deep etching or other processes that produce high aspect ratio structures.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr