About: http://webisa.webdatacommons.org/283932878

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The first conductive layer 111 may be formed of a metal or alloy based mainly on at least one of the materials selected from the group including aluminum, copper, and alpha tantalum (??-Ta).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com