About: http://webisa.webdatacommons.org/284455419

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Still another aspect is a method of processing a substrate in a chamber by applying heat from an LED lamp disposed adjacent to the chamber, the LED lamp being configured to emit directional radiant energy towards the substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au