About: http://webisa.webdatacommons.org/28453457

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Preferably the film thickness will lie in the range from about 0.5 ??m to about 3 ??m, particularly preferably between about 1 ??m and about 2 ??m.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com