| http://www.w3.org/ns/prov#value | - Examples of the replacing group include t-butoxycarbonyl group, t-butoxycarbonylmethyl group, trimethylsilyl group, tetrahydropyranyl group, ethoxyethyl group, ethoxypropyl group, propyloxyethyl group, t-butyl group and the like. [0022] The solvent is preferably one which sufficiently dissolves components usually used in resists such as the polymer, the photosensitive compound and other additives,
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