About: http://webisa.webdatacommons.org/285017522

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	the like and a second protection layer made of metal such as Ta are stacked on the surface of the substrate, so that the heater base 1 is formed.
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com