About: http://webisa.webdatacommons.org/285051542

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	By reducing the amount of high-temperature thermal oxidizing time, bowing due to heat can be prevented, particularly in the case of using large substrates of around 8 inches.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com