About: http://webisa.webdatacommons.org/285296381

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIGS. 10A and 10B show examples of a portion of an alternating phase-shift mask pattern at an end of a lines and spaces array in accordance with another embodiment of the invention.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com