About: http://webisa.webdatacommons.org/285307740

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Naturally, the gate insulating film is not limited to the silicon oxynitride film but other insulating film including silicon may be used as a single layer or a laminated structure.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com