About: http://webisa.webdatacommons.org/285308767

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Particles, such as airborne particles, settle on the pellicle 120, rather than on the reticle 110.
http://www.w3.org/ns/prov#wasQuotedFrom	google.de