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Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Nevertheless, the present invention may also advantageously be employed in silicon on insulator (SOI), germanium, and other semiconductor materials.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com