| http://www.w3.org/ns/prov#value | - C (e.g. comprising one or more dies) of the substrate W.The illumination system may include various types of optical components, such as refractive, reflective, magnetic, electromagnetic, electrostatic or other types of optical components, or any combination thereof, for directing, shaping, or controlling radiation.The support structure supports, i.e. bears the weight of, the patterning device.
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