About: http://webisa.webdatacommons.org/286284020

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Herein, the conducting material mostly used to form the conductive layer for forming the plug is polysilicon and such a barrier metal layer as titanium (Ti) and titanium nitride (TiN) can be possibly stacked thereon.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com