About: http://webisa.webdatacommons.org/286686883

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A conductive material such as metal or poly-silicon can be used to form the gate electrode layer 12.
http://www.w3.org/ns/prov#wasQuotedFrom	freshpatents.com