About: http://webisa.webdatacommons.org/286718815

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Actually, it is difficult to delineate the channel length to be less than 1 ??m, and as a result, there is a problem that the on-state resistance of the SiC power MOSFET becomes high.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com