About: http://webisa.webdatacommons.org/286771551

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As the first insulating film Il, an insulating film mainly made of silicon oxide, silicon oxynitride, silicon nitride, tantalum oxide, titanium oxide, aluminum oxide, hafnium oxide, or hafnium silicon oxynitride is formed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com