About: http://webisa.webdatacommons.org/286795183

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As the material of a substrate having a substantially flat surface, either an insulator such as a ceramic or glass, a metal covered with an insulating film, or a semiconductor is suitable for the purpose of this invention.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com