About: http://webisa.webdatacommons.org/286807210

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A silicon oxynitride film formed by adding O2 to SiH4 and N2O is a suitable material because a fixed charge density is reduced in the film.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca