About: http://webisa.webdatacommons.org/286854794

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Using sputtering or plasma CVD, the barrier layer is formed of an inorganic film that is made of an inorganic material such as silicon nitride, tantalum oxide, aluminum nitride, or diamond-like carbon (DLC) made of carbon.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com