About: http://webisa.webdatacommons.org/287096525

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	the objective is a projection objective configured to be used in a microlithography projection exposure apparatus.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com