About: http://webisa.webdatacommons.org/287224765

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The production method of the TFT in the present Embodiment is a method including the above-mentioned back surface exposure and development treatment in addition to the method shown in Embodiment 1.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com