About: http://webisa.webdatacommons.org/287226757

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Physical vapor deposition (PVD) or sputtering is a known technique used in the manufacture of integrated circuits.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com