About: http://webisa.webdatacommons.org/287253990

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The Flow-Through Ion Gun is a new type of tool that can clean surfaces or deposit thin films of many different kinds of elements and chemical compounds onto both conducting and insulating surfaces.
http://www.w3.org/ns/prov#wasQuotedFrom	lanl.gov