About: http://webisa.webdatacommons.org/287568783

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The invention provides a polishing disk and method for polishing a substrate, in particular semiconductor devices.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com