About: http://webisa.webdatacommons.org/287617314

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The fill layer may comprise any one or more insulating layers, such as silicon oxide, silicon nitride, silicon oxynitride, PSG, BPSG, spin-on glass or a polymer based dielectric, such as polyimide.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es