About: http://webisa.webdatacommons.org/287619439

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The insulating layer 106 can also be formed by sputtering onto the silicon carbide 107 from a target made of an insulator such as silicon oxide, silicon nitride, aluminum nitride, or boron nitride.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com