About: http://webisa.webdatacommons.org/287759279

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The buffer insulation film 204 comprises an SiNx film 202 with a thickness of, e.g. 50 nm and an SiO2 film 203 with a thickness of, e.g. 100 nm, which are formed on a no-alkali glass substrate 201.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com