About: http://webisa.webdatacommons.org/287793293

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The process parameters are those that are typically used to maintain the CO2, plus the co-solvents (i.e. alcohols such as methanol) and the active etchant (i.e. HF), in a supercritical fluid state.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com