About: http://webisa.webdatacommons.org/287877930

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The films are grown in a functional device geometry and are of a thickness that is regularly used in applications, such as PiezoMEMS. At this thickness, the films are relaxed from epitaxial strain.
http://www.w3.org/ns/prov#wasQuotedFrom	utwente.nl