About: http://webisa.webdatacommons.org/287892544

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http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	20110049285APPARATUS AND METHOD FOR LOADING A FILM CASSETTE FOR GASEOUS VAPOR DEPOSITION - The present invention is an apparatus and method for loading a film cassette for gaseous vapor deposition.
http://www.w3.org/ns/prov#wasQuotedFrom	faqs.org