About: http://webisa.webdatacommons.org/287925105

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Through the vacuum annealing, impurities, such as carbon, which remain on the HfO2 dielectric layer 30, can be effectively removed without degrading the electrical characteristics of the capacitor.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es