About: http://webisa.webdatacommons.org/287949828

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The chemical mechanical polishing slurry of claim 17 wherein the metal oxide abrasive is selected from the group including alumina, ceria, germania, silica, titania, zirconia, and mixtures thereof.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com