About: http://webisa.webdatacommons.org/288100853

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The thickness of the thin film in the present invention is not particularly specified, but may be 20 ??m or below.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com