About: http://webisa.webdatacommons.org/288124147

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The silicon nitride film is superior in barrier property, which can thus provide a blocking effect of blocking the mixing of oxygen, moisture in the air, ionic impurity such as sodium, or the like.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com