| http://www.w3.org/ns/prov#value | - These thin metal film bus bars may be deposited onto conductive electrode 4 and/or 4' by vacuum deposition, such as by evaporation or sputtering, and typically have a width within the range of about 0.05 mm to about 6 mm (and preferably with a thickness in the range of 0.05 ??m to about 5 ??m or greater) and are inboard from the perimeter edge of the substrate.
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