| http://www.w3.org/ns/prov#value | - The tungsten nucleation layer may be formed, for example, from a reaction of a tungsten-containing precursor such as, for example, tungsten hexafluoride (WF6) with a reducing gas such as for example, silane (SiH4), disilane (Si2H6), borane (BH3) and diborane (B2H6), among others.
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