| http://www.w3.org/ns/prov#value | - FIG. 2D is a plan view of yet another embodiment of the cluster tool 10, which is similar to the embodiment shown in FIG. 2B, with the addition of two slide assemblies 714A-B (described in FIG. 8F) which allows the base of the front end robot 108 and the base of the central robot 107 and rear robot 109 to translate along the length (items A1, A2 and A3, respectively) of the cluster tool 10.
|
