About: http://webisa.webdatacommons.org/288387508

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 6 is a schematic diagram of an example of the film-forming apparatus which is suitable for practicing the process of the present invention.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au