About: http://webisa.webdatacommons.org/288483171

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 3 is a flow chart of an exemplary process control computer program product used to control the exemplary CVD processing chamber of FIG. 1A;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com