About: http://webisa.webdatacommons.org/288509509

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 4 is a rotary mechanism for operating a wafer maintainer and a carrier stage of a wafer transfer apparatus embodying the present invention;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com