About: http://webisa.webdatacommons.org/288593606

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 3 is an illustration of a cross-sectional view of a single-trench alternating phase-shifting mask with two-sided etchback in the prior art.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com