About: http://webisa.webdatacommons.org/288646593

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 14 is a schematic representation of an alternative embodiment for planarizing dielectric layer endpoint-detection of a semiconductor wafer.
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com