About: http://webisa.webdatacommons.org/289114538

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A plasma etching apparatus 1 shown in FIG. 1 comprises a housing 2 consisting of a material such as aluminum, and a process chamber 3 is air-tightly formed in the housing 2.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au